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2006-01-27 - Optical film thickness measuring system GSM 1100 for PVD systems presentedWith the optical measuring system GSM 1100, users now have a convenient tool at hand for in-situ process monitoring and for detecting the process end. The GSM 1100 is available in two versions named 'Standard' and 'Broadband'. Both versions are used to measure the spectral characteristic of thin optical films during the coating process. Depending on the coating requirements, varied criteria may be used to detect the end of the process. The basic versions operate at wavelengths between 400 and 1100 nm. The measuring range can be extended by adding an optional additional light source (wavelength 200 through 1100 nm or 400 through 2000 nm). The Standard version operates at one specified wavelength, whereas the Broadband version may also be used to record spectra across the entire measuring range. Both versions are integrated into the KHAN process control system. In addition, open interfaces enable the integration into customer-specific environments. For more information on the GSM 1100, refer to the website of Evatec Process Systems Ltd.:
In Germany, Austria, Czech Republic and Slovakia, Evatec Thinfilm Technology is the sole distribution and service partner for the legendary BAK system family which has gained popularity under the brands of Balzers and then Unaxis. As of June 1, 2004, the BAK family is being manufactured and developed by Evatec Process Systems Ltd. in Flums/Switzerland. Contact: |
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