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2005-12-16 - Compact BAK coating system for research and process development presentedWith the BAK 501 vacuum coating system, Evatec Process Systems Ltd. presents a new coating system for research and development. The BAK 501 is the latest member of the BAK family. The process chamber has a size of 500 x 500 x 500 mm and uses the same reliable components that are also employed in the larger production systems. This makes it easy to transfer processes later on. The media distributor, turbopump system, power supplies and the system control are tightly integrated into the system frame. The compact layout of the BAK 501 results in a very small footprint. The BAK 501 can be equipped with the ESQ 212 and ESQ 110 electron beam evaporation sources, various multiple-pocket crucibles and boat evaporators, a rotary drive for various substrate carriers, a QSK 621 quartz measuring head, as well as the related power supplies and control units. The system is controlled by means of the KHAN XP BASIC software which has been optimized for process development. In Germany, Austria, Czech Republic and Slovakia, Evatec Thinfilm Technology is the sole distribution and service partner for the legendary BAK system family which has gained popularity under the brands of Balzers and then Unaxis. As of June 1, 2004, the BAK family is being manufactured and developed by Evatec Process Systems Ltd. in Flums/Switzerland. Contact: |
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