Coating System Balzers BAK 760 with BPU 420
Photograph: Balzers BAK 760 coaters with different control systems
Technical Data:
| Roughing station: |
Rotary vane pump and Roots blower, open |
| High-vacuum pump: |
Diff 500 with baffle or cryopump |
| High-voltage supply: |
EHV 110 |
| Gun controller: |
2 x EKS 110 |
| System control: |
BPU 420 |
| Vacuum gauges: |
3 x TPR 010, IKR 010 |
| Quartz holder: |
6-fold quartz holder QSK 610 |
| Quartz measurement: |
QM 420 |
| Number and type of guns: |
2 guns ESQ 110 |
| Calotte heater: |
400 Volts, 3 zones, max. 350 °C |
| Evaporation boats: |
3 x with power supply |
Contact:
Ralf Eichert
Tel. +49 (0)89-998187-20
Fax +49 (0)89-998187-10
E-mail: info@ettnet.de
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