Vacuum Coating System Balzers BAK760 with BPU 100
Photograph: Balzers BAK 760 coaters with different control systems
Technical Data:
| Roughing station: |
Rotary vane pump and Roots blower, open |
| High-vacuum pump: |
Diff 500 with baffle or cryopump |
| High-voltage supply: |
EHV 110 |
| Gun controller: |
EKS 110 |
| System control: |
BPU 100, MC 101 |
| Terminal: |
Manual control box KP 101 |
| Vacuum gauges: |
TPR 010, IKR 010 |
| Quartz holder: |
6-fold quartz holder QSK 621,
Manual switch GTS 621 |
| Quartz measurement: |
QM 101 |
| Test glass device: |
GTC 621, parallel control
via manual switch GTS 621 |
| Number and type of guns: |
1 gun ESQ 110 |
| Meissner trap: |
LN2 Meissner trap with BAN 104 |
Contact:
Ralf Eichert
Tel. +49 (0)89-998187-20
Fax +49 (0)89-998187-10
E-mail: info@ettnet.de
|
