Vacuum Coater Balzers BA 710
Photograph: Balzers BA 710 Coater
Technical Data:
| Roughing station: |
Rotary vane pump and Roots blower, open |
| High-vacuum pump: |
Diff 320 with baffle or cryopump |
| High-voltage supply: |
EHV 110 |
| Gun controller: |
EKS 110 |
| System control: |
BPU 100, MC 101 |
| Vacuum gauges: |
TPR 010, IKR 010 |
| Quartz holder: |
1-fold quartz holder QSK 300 |
| Quartz measurement: |
QM 101 |
| Number and type of guns: |
1 gun ESQ 110 |
| Calotte heater: |
230 Volts, 3 zones |
| Evaporation boats |
2 x with power supply |
| Glow discharge electrode: |
Complete, with gas inlet |
Contact:
Ralf Eichert
Tel. +49 (0)89-998187-20
Fax +49 (0)89-998187-10
E-mail: info@ettnet.de
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