BAK 641 coating system - Laboratory and production system for low throughput

The BAK 641 coating system is the little brother of the BAK 761. The coating system can be used for all applications that require only a low throughput. It it suitable both as a laboratory system and as a production system.

BAK 641 front view with clean room cover	BAK 641 with open process chamber door	BAK 641 - side view with integrated electrical racks

The system can be equipped with the ESQ 110 or ESQ 212 electron beam guns. As an option, various ion sources may be used for pre-cleaning of the substrates. The system control is equipped with a KHAN controller of the latest generation. Because of its compact design, the BAK 641 can be transported as one unit and installed within two days.

Please contact Ralf Eichert for more information.