BAK 501 - Laboratory system for research and process development
The BAK 501 is the smallest system in the family of BAK Vacuum Coating
Systems. It has been developed specially for process development and for use in
research labs.
The process chamber has a size of 500 x 500 x 500 mm and uses the same reliable
components that are also employed in the larger production systems. This makes it
easy to transfer processes later on. The media distributor, turbopump system, power
supplies and the system control are tightly integrated into the system frame. The
compact layout of the BAK 501 results in a very small footprint.
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| BAK 501 |
BAK 501 - Process control software KHAN
XP |
BAK 501 - Media distribution |
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The BAK 501 can be equipped with the ESQ 212 and ESQ 110 electron beam evaporation
sources, various multiple-pocket crucibles and boat evaporators, a rotary drive
for various substrate carriers, a QSK 621 quartz measuring head, as well as the
related power supplies and control units. The system is controlled by means of the
KHAN XP BASIC software which has been optimized for process development.
Please contact Ralf Eichert for more information.
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