Vacuum Coating System BAK 1101

The BAK 1101 coating system is the big brother of the BAK 761. The coating system can be used for all applications that require a high throughput. It is suitable as a production system for coating of 6" wafers.

BAK 1101 process chamber door	Graphic user interface KHAN XP	Operating panel with graphic user interface

High reliability, excellent coating homogeneity, reproducibility and a large selection of evaporation units are only a few properties characterizing the coating system.

Please contact Ralf Eichert for more information.